SAM® SFC-1480F SERIES

SFC-1480F Series is a basic series of compact digital Mass Flow Controllers offering very low flow.

FEATURES

• Very fast response < 0,7 - 1,2 sec flow settling time
• Metal/rubber seals
• Flow 1 SCCM - 20 SLM (12 models available)
• Leak integrity < 1 x 10^-11 Pa m³/s He (Viton 10^-8)

BENEFITS

• Monitoring of operation using digital interface is possible
• Minimal particle generation
• Long operation life