SAM® 1480/2480 G4 SERIES

G4 models is the most advanced MFC meeting or exceeding the demand of the actual and also the next generation of semiconductor production.

FEATURES

• Multi-gas, multi-range selection
• Pressure-insensitive operation
• Valve shut-off function
• In-line integrated flow verification system
• Self celibration function
• LCD display (temp, pressure, set, output) easifies control routines

BENEFITS

• Great inlet pressure change insensitivity
• Allows one mass flow controller to handle two or more gas types and ranges
• The need for dedicated devices is reduced to only a few models
• Reduces the capital investment and inventory liability
• Performance maintained after gas change
• Shortening gas purge time needed
• Complete gas shut-off
• Gas leaking volume 1/10 related to that with a standard combination (MFC and pneumatic valve)
• Reduction of ga surge
• Allows one mass flow controller to handle two or more gas types and ranges
• The need for dedicated devices is reduced to only a few models
• Reduces the capital investmen and inventory liability
• Performace mainted after gas change